◆특징
▷PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications.
▷Most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes.
▷Also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer.
▷Standard PMMA products cover a wide range of film thicknesses and are formulated with 495,000 & 950,000 molecular weight (MW) resins in either chlorobenzene or the safer solvent anisole.
◆사양
▷All MCC PMMA resists are available in package sizes from 500ml to 20 liters.
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